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This white paper discusses the advantages, design criteria, and material choices for saw filters along with a detailed overview of saw filter performance characteristics. This paper reports the wafer level surface acoustic wave (saw) filter package design, fabrication technology, and reliability aspects. Surface acoustic waves sensors are based on piezoelectric materials.
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The key process including cavity wall. The fabrication of the chip was completed by the ningxia saw technology company limited (ningxia, china) after a series of processes such as coating,. These techniques are based on a newly developed submicron photolithography as the.
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